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Leak detection solutions for semiconductor components/seals

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Program overview
It is used for leak detection of electronic components/seals. The solution consists of a pressure helium tank, a leak detection tank and a helium mass spectrometer leak detector.
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Scheme composition
The solution is composed of a pressure helium tank, a leak detection tank and a helium mass spectrometer leak detector. The electronic components or seals are placed into the pressure helium tank, the helium gas of the specified concentration and pre
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Scheme features
1. The unique gas circuit design improves the pumping speed of helium, shortens the background time of helium cleaning and effectively prevents helium pollution;
2. The minimum detectable leak rate is low, the sensitivity is high and the detection range can be up to Level 12;
3. Intelligent fault indication and alarm functions.
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Industry application
Huawei Technologies Co., Ltd.
The 38th Research Institute of China Electronics Technology Group
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